Western Nanofabrication Facility
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Scanning Electron Microscopy Service and or Training
Flat-Rate SEM imaging service
Scanning Electron Microscopy Gallery
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Lithography
CEE spinner
MJB3
ebeam lithography
YES HMDS oven
MA6
Solitec spinner
FIB lithography
Deposition
Electroplating Bench
LB trough
OPC 80T
Sputtering
ebeam 1
STS PECVD
Etch
STS RIE
Characterization
1540XB SEM
1530 SEM
KLA Tencor P7
Zeiss Axioskop2
Leica stereozoom
Woolam VASE
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Jipelec RTA
Spin Rinse
Dicing Saw
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Deposition
Electron Beam Evaporation
Osmium Plasma Coater
IKO Electroplating Bench
STS PECVD
Langmuir-Blodgett Trough
Edwards AUTO 500 Sputtering