Western Nanofabrication Facility

Nanofabrication Facility Instrumentation

Characterization

1540XB FIB/SEM
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Tencor P7 Profilometer
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1530 SEM
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Woollam Ellipsometer
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Leica Stereozoom
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Zeiss Axioskop
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Mitutoyo Finescope
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Lithography

Neutronix-Quintel NXQ4006 Mask Aligner
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Solitec 5110 coater/developer
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Karl Suss MA6 Mask Aligner
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CEE 200 spinner
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Zeiss 1530 e-beam Lithography
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Yield Engineering YES-3TA HMDS oven
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Zeiss 1540XB FIB lithography
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Innopsys Innostamp
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Deposition

Angstrom e-beam Deposition
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IKO Electroplating Bench
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Custom e-beam Deposition
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Filgen Osmium Plasma Coater
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STS PECVD
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Edwards Auto500 Sputtering
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Etching

Trion Orion RIE
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Miscellaneous

Grey Lab Spinner
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Ozone Cleaner
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Spin Rinse Dryer
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Dicing Saw
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