Solitec 5110 Spinner/Developer

• Spin speed range from 200 to 8000RPM
• Acceleration control from 1KRPM to 40 RPM/sec
• Substrate size can range from 0.5” to 6” (9" for developer) diameter
• Developer - 5 function controller; prewet cycle, developer cycle, developer rinse and develop cycle, DI rinse, and spin dry with or without nitrogen