Western Nanofabrication Facility

Links to Microsoft Booking Calendars for Nanofab



Nanofab closes for the Holidays on Thursday December 16th.

1540XB FIB/SEM

1530 SEM

Yellow Room (For resist processing / photolithography / fume hood / AxioScope)

Wet Chemistry Lab (For PDMS processing or Ozone cleaner)

NXQ4006 Mask Aligner (You must also book the Yellow Room Calendar)

Central Fumehood

Angstrom Evaporator

Edwards Sputtering

Woollam Ellipsometer

Hoser Evaporator

Trion RIE