Western Nanofabrication Facility

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Lithography

LEO 1530 e-beam lithography
LEO 1540XB FIB lithography
Karl Suss MA6
Karl Suss MJB3
Solitec 5110 coater/developer
CEE 200 Spinner
Oriel DUV exposure source
Yield Engineering YES-3TA HMDS oven

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