Western Nanofabrication Facility
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Oriel DUV
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ebeam lithography
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MA6
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LB trough
OPC 80T
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ebeam 2
ebeam 1
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STS RIE
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Alcatel 601E
Characterization
Zeiss Axioskop2
1540XB
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Equipment
Deposition
Edwards Auto500 Sputtering
E-beam deposition #1
E-beam deposition #2
Electroplating Bench
STS PECVD
Osmium Plasma Coater
KSV 3000 Langmuir-Blodgett Trough
Etch
Alcatel 601E deep silicon etch
STS RIE
Gasonics Aura
Lithography
LEO 1530 e-beam lithography
LEO 1540XB FIB lithography
Karl Suss MA6
Karl Suss MJB3
Solitec 5110 coater/developer
CEE 200 Spinner
Oriel DUV exposure source
Yield Engineering YES-3TA HMDS oven
Characterization
LEO 1540XB FIB/SEM
LEO 1530 SEM
Zeiss Axioskop 2 MAT inspection microscope
Leica MZ12.5 sterozoom microscopes
Dektak surface profilometer
Woolam M2000V VASE Ellipsometer
Miscellaneous
Jipelec Jetfirst
K&S 780 Dicing Saw
Semitool spin rinse dryer
Cleanroom Introduction
Tuesday December 11th, 10am
please contact
Tim Goldhawk
to register.
SEM Introductory Training
Friday December 15th, 9:00am (FULL)
please contact
Todd Simpson
to register.