Equipment

Equipment

Deposition

Edwards Auto500 Sputtering
E-beam deposition #1
E-beam deposition #2
STS PECVD
Osmium Plasma Coater
KSV 3000 Langmuir-Blodgett Trough

Etch

Alcatel 601E deep silicon etch
STS RIE
Gasonics Aura

Lithography

LEO 1530 e-beam lithography
LEO 1540XB FIB lithography
Karl Suss MA6
Karl Suss MJB3
Solitec 5110 coater/developer
CEE 200 Spinner
Oriel DUV exposure source
Yield Engineering YES-3TA HMDS oven

Characterization

LEO 1540XB FIB/SEM
LEO 1530 SEM
Nanometrics Nanospec AFT 4150
Zeiss Axioskop 2 MAT inspection microscope
Leica MZ12.5 sterozoom microscopes
Dektak surface profilometer
Woolam M2000V VASE Ellipsometer

Miscellaneous

Jipelec Jetfirst
K&S 780 Dicing Saw
Semitool spin rinse dryer